Method for producing at least one three-dimensional component for the uni-, bi-, tri- or multi-directional measurement and/or generation of vector fields and three-dimensional component for the uni-, bi-, tri- or multi-directional measurement and/or generation of vector fields

US11467226B2 · kind B2 · utility

Assignee

• Leibniz-Institut für Festkörper- und, Werkstoffforschung Dresden e. V. · DE

Inventors

• Daniil Karnaushenko · Dresden, DE
• Dimitriy Karnaushenko · Dresden, DE
• Oliver Schmidt · Palo Alto, US

Key dates

• Filing date: Oct 4, 2017
• Grant date: Oct 11, 2022
• Expiry date: Sep 12, 2039

Classification

• Technology area (CPC G): Physics
• CPC primary: G01R33/091
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

The invention concerns the field of microelectronics and relates to a three-dimensional component which, for example as a sensor, measures the direction of a property in a vector field. The object of the present solution is to specify a three-dimensional component that is capable of measuring and/or generating vector fields in multiple directions and/or simultaneously with low space requirements. The object is attained with a three-dimensional component for the uni-, bi-, tri- or multi-directional measurement and/or generation of vector fields, in which component at least one element made of material systems in present on a three-dimensional carrier made of at least one carrier material, which element measures and/or generates at least one vector field in at least one direction in the spatial position of the element on, against and/or in the carrier.