Systems and methods for wafer pod alignment
US11469128B2 · kind B2 · utility
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15References
20Claims
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Key dates
| Filing date | Aug 10, 2020 |
| Grant date | Oct 11, 2022 |
| Priority date | — |
| Expiry date | Aug 10, 2040 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/137
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
In an embodiment, a wafer pod includes: a cavity configured to receive and store a wafer; an alignment fiducial within the cavity, wherein: the alignment fiducial comprises two lines orthogonal to each other, and the alignment fiducial is configured to be detected by a robotic arm alignment sensor disposed on a robotic arm, wherein the alignment fiducial defines an alignment orientation for a robotic arm gripper hand to enter into the cavity.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.