Patent · US Active

Membrane with hierarchically arranged micrometer-sized and sub micrometer-sized units, pressure sensor system with improved measurement accuracy and method for producing such a pressure sensor system

US11473990B2 · kind B2 · utility

0Cited by

2References

11Claims

0Family size

Assignee

TDK Electronics AG · JP

Inventors

Markus Eberstein · Berlin, DE
Peter Sattler · Zwingenberg, DE
Christian Wohlgemuth · Berlin, DE

Key dates

Filing date	Sep 16, 2019
Grant date	Oct 18, 2022
Priority date	—
Expiry date	Sep 20, 2039

Classification

Technology area (CPC G)Physics
CPC primaryG01L19/14
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

In an embodiment a membrane includes a hydrophobic region having a plurality of hierarchically arranged micrometer-sized and submicrometer-sized units consisting of a membrane material, wherein a single micrometer-sized unit has a diameter of from 1 μm to 5 μm and a single submicrometer-sized unit has a diameter of <1 μm, and wherein the membrane is configured to be used in a pressure sensor system.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.