Tunable MEMS etalon device
US11474343B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 20, 2017 |
| Grant date | Oct 18, 2022 |
| Priority date | — |
| Expiry date | Jul 8, 2038 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2201/042
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Tunable MEMS etalon devices comprising: a front mirror and a back mirror, the front and back mirrors separated in an initial pre-stressed un-actuated etalon state by a gap having a pre-stressed un-actuated gap size determined by a back stopper structure in physical contact with the front mirror and back mirrors, the etalon configured to assume at least one actuated state in which the gap has an actuated gap size gap greater than the pre-stressed un-actuated gap size; an anchor structure, a frame structure fixedly coupled to the front mirror at a first surface thereof that faces incoming light, and a flexure structure attached to the anchor structure and to the frame structure but not attached to the front mirror, and a spacer structure separating the anchor structure from the back mirror, and wherein the front mirror and the spacer structure are formed in a same single glass layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.