Driving multiple resonance MEMS mirrors with a single frequency
US11474425B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 14, 2019 |
| Grant date | Oct 18, 2022 |
| Priority date | — |
| Expiry date | Dec 5, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B27/0172
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A control circuit includes a first control circuit generating a first drive control signal from a pre-drive signal (that is a frequency at which an opening angle of the first and second mirrors is equal) for the first mirror. A second control circuit generates a second drive control signal from the pre-drive signal for the second mirror. First and second drivers generate first and second drive signals for the first and second mirrors from the first and second drive control signals. The first and second drive control signals are generated so that the first and second drive signals each have a same frequency as the pre-drive signal but are different in amplitude from one another to cause the first and second mirrors to move at a same frequency, with a same and substantially constant given opening angle as one another, and in phase with one another.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.