Patent · US Active

Fluidic flow channel over active surface of a die

US11476171B2 · kind B2 · utility

0Cited by
2References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateFeb 19, 2021
Grant dateOct 18, 2022
Priority date
Expiry dateApr 15, 2041

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2924/15153
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

Provided herein include various examples of an apparatus, a sensor system and examples of a method for manufacturing aspects of an apparatus, a sensor system. The apparatus may include a die. The apparatus may also include a substrate comprising a cavity. The die may be oriented in a portion of the cavity in the substrate, where the orientation defines a first space in the cavity adjacent to a first edge of the upper surface of the die and a second space in the cavity adjacent to the second edge of the upper surface of the die. The apparatus may further include fluidics fan-out regions comprising a first cured material deposited in the first space and the second space, a surface of the fluidics fan-out regions being contiguous with the upper surface of the die.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.