Vacuum system with a multi-stage and multi-inlet vacuum pump with a directional element separating pump stages
US11480181B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Jul 7, 2020 |
| Grant date | Oct 25, 2022 |
| Priority date | — |
| Expiry date | Aug 18, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J49/24
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
The invention relates to a vacuum system, comprising a vacuum pump, preferably turbomolecular pump, and at least one vacuum chamber, wherein the vacuum pump comprises: at least a first and a second inlet and a common outlet; at least a first and a second pumping stage, each pumping stage comprising at least one rotor element being arranged on a common rotor shaft, wherein the first inlet is connected to an upstream end of the first pumping stage and the second inlet is connected to an upstream end of the second pumping stage; a direction element for preventing a gas flow from a downstream end of the first pumping stage to the second inlet; a conduit having a conduit inlet and a conduit outlet, wherein the conduit inlet is connected to the downstream end of the first pumping stage and the conduit outlet is connected to a location downstream of the second pumping stage; wherein the first inlet and the second inlet of the pump are connected to the same vacuum chamber.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.