MEMS-based rotation sensor for seismic applications and sensor units having same
US11487031B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 18, 2019 |
| Grant date | Nov 1, 2022 |
| Priority date | — |
| Expiry date | May 12, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01V1/38
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present disclosure is directed to a MEMS-based rotation sensor for use in seismic data acquisition and sensor units having same. The MEMS-based rotation sensor includes a substrate, an anchor disposed on the substrate and a proof mass coupled to the anchor via a plurality of flexural springs. The proof mass has a first electrode coupled to and extending therefrom. A second electrode is fixed to the substrate, and one of the first and second electrodes is configured to receive an actuation signal, and another of the first and second electrodes is configured to generate an electrical signal having an amplitude corresponding with a degree of angular movement of the first electrode relative to the second electrode. The MEMS-based rotation sensor further includes closed loop circuitry configured to receive the electrical signal and provide the actuation signal. Related methods for using the MEMS-based rotation sensor in seismic data acquisition are also described.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.