Method for detecting moisture in an integrated circuit, and associated integrated circuit
US11493470B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 14, 2020 |
| Grant date | Nov 8, 2022 |
| Priority date | — |
| Expiry date | Aug 5, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L23/564
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Moisture that is possibly present in an integrated circuit is detected autonomously by the integrated circuit itself. An interconnect region of the integrated circuit includes a metal level with a first track and a second track which are separated by a dielectric material. A detection circuit applies a potential difference between the first and second tracks. A current circulating in one of the first and second tracks in response to the potential difference is measured and compared to a threshold. If the current exceeds the threshold, this is indicative of the presence of moisture which renders said dielectric material less insulating.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.