Cryogenic microfluidic cooling for photonic integrated circuits
US11493687B1 · kind B1 · utility
1Cited by
8References
15Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jul 2, 2020 |
| Grant date | Nov 8, 2022 |
| Priority date | — |
| Expiry date | Jul 31, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06N10/20
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Techniques disclosed herein relate generally to photonic integrated circuits working at cryogenic temperatures. In one example, a device includes a substrate, a dielectric layer on the substrate, an optical waveguide in the dielectric layer, a superconducting circuit in the dielectric layer and coupled to the optical waveguide, and a micro-channel in the dielectric layer and adjacent to the superconducting circuit. The micro-channel is aligned with the superconducting circuit and is configured to conduct a liquid at a cryogenic temperature to locally cool the superconducting circuit.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.