Method and device for determining fabrication chamber
US11495602B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 12, 2022 |
| Grant date | Nov 8, 2022 |
| Priority date | — |
| Expiry date | Jan 12, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67069
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Embodiments of the present disclosure provide a method and a device for determining a fabrication chamber. According to a current radio frequency power time of each of the fabrication chambers corresponding to adjacent process steps and service phases divided based on a service period of the fabrication chambers, a service phase is determined for the current radio frequency power time of each of the fabrication chambers. For target objects processed by the fabrication chambers in the current process step, fabrication chambers for the target objects to enter in a next process step are directly determined according to the service phase of the current radio frequency power time of each of the fabrication chambers.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.