Planar MEMS-based phase shifter having a MEMS actuator for adjusting a distance to provide a phase shift
US11495869B2 · kind B2 · utility
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12Claims
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Key dates
| Filing date | Dec 9, 2020 |
| Grant date | Nov 8, 2022 |
| Priority date | — |
| Expiry date | Dec 9, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01P11/00
- WIPO fieldTelecommunications
- WIPO sectorElectrical engineering
Abstract
A planar micro-electromechanical system (MEMS)-based phase shifter is described which comprises a dielectric substrate, a grounded coplanar waveguide (GCPW) transmission line for carrying input and output signals, a high-resistivity silicon (HRS) slab coated with metallic gratings over the GCPW line, and a MEMS actuator for adjusting a distance between the HRS slab and the GCPW line to provide a phase shift.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.