Patent · US Active

Neural network training device, system and method

US11501424B2 · kind B2 · utility

0Cited by
3References
33Claims
0Family size

Assignee

Inventor

Key dates

Filing dateNov 18, 2019
Grant dateNov 15, 2022
Priority date—
Expiry dateFeb 3, 2040

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG06T2207/30148
  • WIPO fieldComputer technology
  • WIPO sectorElectrical engineering

Abstract

A device includes image generation circuitry and convolutional-neural-network circuitry. The image generation circuitry, in operation, generates a digital image representation of a wafer defect map (WDM). The convolutional-neural-network circuitry, in operation, generates a defect classification associated with the WDM based on the digital image representation of the WDM and a data-driven model generated using an artificial wafer defect digital image (AWDI) data set and associating AWDIs with classes of a defined set of classes of wafer defects. A wafer manufacturing process may be controlled based on the classifications of WDMs.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.