Method of influencing a charged particle beam, multipole device, and charged particle beam apparatus

US11501946B2 · kind B2 · utility

Assignee

• ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH · DE

Inventors

• Benjamin John Cook · Munich, DE
• Bernd Woellert · Borgo San Lazzaro, DE
• Dieter Winkler · Munich, DE

Key dates

• Filing date: Mar 1, 2021
• Grant date: Nov 15, 2022
• Expiry date: Mar 1, 2041

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01J2237/2811
• WIPO field: Electrical machinery, apparatus, energy
• WIPO sector: Electrical engineering

Abstract

A method of influencing a charged particle beam (11) propagating along an optical axis (A) is described. The method includes: guiding the charged particle beam (11) through at least one opening (102) of a multipole device (100, 200) that comprises a first multipole (110, 210) with four or more first electrodes (111, 211) and a second multipole (120, 220) with four or more second electrodes (121, 221) arranged in the same sectional plane, the first electrodes and the second electrodes being arranged alternately around the at least one opening (102); and at least one of exciting the first multipole to provide a first field distribution for influencing the charged particle beam in a first manner, and exciting the second multipole to provide a second field distribution for influencing the charged particle beam in a second manner. Further, a multipole device (100, 200) with a first multipole (110, 210) and a second multipole (120, 220) provided on the same substrate as well as a charged particle beam apparatus (500) with a multipole device (100, 200) are provided.