Method for exhaust gas abatement under reduced pressure and apparatus therefor
US11504669B2 · kind B2 · utility
0Cited by
1References
4Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 20, 2018 |
| Grant date | Nov 22, 2022 |
| Priority date | — |
| Expiry date | Nov 28, 2039 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02C20/30
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
The present invention provides an energy-efficient method and apparatus that can achieve exhaust gas abatement with a minimum use of diluent nitrogen gas. More specifically, the present invention is directed to a method and apparatus for exhaust gas abatement under reduced pressure, in which an exhaust gas supplied from an exhaust gas source via a vacuum pump is decomposed by heat of a high-temperature plasma under a reduced pressure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.