Process for the generation of metal-containing films
US11505562B2 · kind B2 · utility
2Cited by
8References
7Claims
0Family size
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Key dates
| Filing date | Nov 9, 2018 |
| Grant date | Nov 22, 2022 |
| Priority date | — |
| Expiry date | Nov 9, 2038 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/45553
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Described herein is a process for preparing inorganic metal-containing films including bringing a solid substrate in contact with a compound of general formula (I) or (II) in the gaseous state
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.