Patent · US Active

Process for the generation of metal-containing films

US11505562B2 · kind B2 · utility

2Cited by
8References
7Claims
0Family size

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Key dates

Filing dateNov 9, 2018
Grant dateNov 22, 2022
Priority date
Expiry dateNov 9, 2038

Classification

  • Technology area (CPC C)Chemistry; Metallurgy
  • CPC primaryC23C16/45553
  • WIPO fieldSurface technology, coating
  • WIPO sectorChemistry

Abstract

Described herein is a process for preparing inorganic metal-containing films including bringing a solid substrate in contact with a compound of general formula (I) or (II) in the gaseous state

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.