Method for preventing contamination of base plate
US11505862B2 · kind B2 · utility
0Cited by
3References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 1, 2021 |
| Grant date | Nov 22, 2022 |
| Priority date | — |
| Expiry date | Mar 1, 2041 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02E10/546
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A method for preventing contamination of a base plate having a step of, after producing polycrystalline silicon in a reactor having the base plate and a lid covering the base plate, removing the lid from the base plate; and a step of isolating space including the base plate by an isolation device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.