Silicon nitride waveguide based integrated photonics optical gyroscope chip with novel materials for phase shifter
US11506494B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jan 14, 2022 |
| Grant date | Nov 22, 2022 |
| Priority date | — |
| Expiry date | Jan 14, 2042 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/661
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An integrated photonics optical gyroscope fabricated on a silicon nitride (SiN) waveguide platform comprises a first silicon nitride (SiN) waveguide layer that constitute a rotation sensing element; and, a second SiN waveguide layer with additional silicon nitride (SiN) waveguide-based optical components that constitute a front-end chip to launch light into and receive light from the rotation sensing element. The two SiN waveguide layers can be stacked together to have a multi-layer configuration vertically coupled with each other. External elements (e.g., laser, detectors, phase shifter) may be made of different material platform than SiN and can be hybridly integrated to the SiN waveguide platform. The phase shifters can be made of aluminum nitride (AlN) or strontium bismuth titanate (SBT).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.