Nanoimprinted microlens array and wavefront sensor based thereon
US11506823B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 13, 2020 |
| Grant date | Nov 22, 2022 |
| Priority date | — |
| Expiry date | May 18, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B2027/0138
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A wavefront sensor for determining a wavefront of an impinging light beam includes a microlens array formed by nanoimprint lithography. Each microlens of the microlens array includes a plurality of concentric ridges separated by concentric grooves. A ratio F of a width of the concentric ridges to a pitch p of the concentric ridges is a function of a radial distance r from a microlens center to the concentric ridges. An effective refractive index n of microlenses depends on a fill ratio of a binary pattern, which depends on the radial distance from the microlens center. A photodetector array is disposed downstream of the microlens array and configured for receiving the plurality of light spots at the focal plane. An imaging optical rangefinder includes the wavefront sensor, a pulsed light source for emitting probing pulses, and a photodetector for receiving reflected light pulses.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.