System and method for dispatching lot
US11507067B2 · kind B2 · utility
0Cited by
3References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 2, 2020 |
| Grant date | Nov 22, 2022 |
| Priority date | — |
| Expiry date | Jul 2, 2040 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P90/02
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A method is disclosed that includes the operations below: determining, by a processing unit, that arrival times of a lot arrived at N process stages are less than processing times of the lot predetermined to be processed at the N process stages, N being a positive integer; comparing, by the processing unit, idle times of multiple tools in the N process stages; and processing the lot with a first tool of the tools at each one of the N process stages, wherein the first tool of the tools has a shortest idle time.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.