Patent · US Active

Detection and correction of system responses in real-time

US11508551B2 · kind B2 · utility

1Cited by

2References

20Claims

0Family size

Assignee

KLA Corporation · US

Inventors

Henning Stoschus · Wetzlar, DE
Stefan Eyring · Weilburg, DE
Christopher T. Sears · Avondale Estates, US

Key dates

Filing date	Nov 22, 2019
Grant date	Nov 22, 2022
Priority date	—
Expiry date	Nov 23, 2039

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/2826
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A detection and correction method for an electron beam system are provided. The method includes emitting an electron beam towards a specimen; modulating a beam current of the electron beam to obtain a beam signal. The method further includes detecting, using an electron detector, secondary and/or backscattered electrons emitted by the specimen to obtain electron data, wherein the electron data defines a detection signal. The method further includes determining, using a processor, a phase shift between the beam signal and the detection signal. The method further includes filtering, using the processor, the detection signal based on the phase shift.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.