Ion pumps and ion pump elements
US11508564B2 · kind B2 · utility
0Cited by
7References
10Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Nov 19, 2014 |
| Grant date | Nov 22, 2022 |
| Priority date | — |
| Expiry date | May 11, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J41/12
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An ion pump includes an evacuateable envelope having a chamber. A first and a second cathode are disposed within the chamber and spaced apart from one another. An anode is spaced apart from and between the first and second cathodes. The anode has an anode body with a textured surface that defines capture regions for fixing material sputtered from the first and second cathodes and controlling size of sputter depositions shed from the anode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.