Vibrator device, oscillator, gyro sensor, electronic apparatus, and vehicle
US11509288B2 · kind B2 · utility
0Cited by
1References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 3, 2020 |
| Grant date | Nov 22, 2022 |
| Priority date | — |
| Expiry date | Apr 20, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03L1/04
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A vibrator device includes a vibration element including a vibration portion and a fixed portion, a supporting member to which the fixed portion is attached to support the vibration element, and a first substrate to which the supporting member is attached, the supporting member includes a attaching portion attached to the first substrate, and A1≥A2 is satisfied in a case where an area of a rectangular region including the fixed portion is A1 and an area of a rectangular region including the attaching portion is A2 in a plan view seen from a thickness direction of the vibration element.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.