High-load vacuum chamber motion feedthrough system and methods
US11511249B2 · kind B2 · utility
1Cited by
12References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 24, 2020 |
| Grant date | Nov 29, 2022 |
| Priority date | — |
| Expiry date | Dec 24, 2040 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01J3/03
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A feedthrough for use in a vacuum chamber is provided and includes a hollow tube having a length, an inner circumference, and a first recess located within the inner circumference. The feedthrough also includes a first O-ring captured by the first recess within the hollow tube. The feedthrough further includes a rod extending through an entirety of the length of the hollow tube. An outer circumference of the rod is configured to contact an entirety of an inner circumference of the first O-ring, and a vacuum fitting is fixedly secured to the hollow tube.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.