Precision vibration-isolation system with floor feedforward assistance
US11512757B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 15, 2018 |
| Grant date | Nov 29, 2022 |
| Priority date | — |
| Expiry date | Oct 3, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05B2219/25257
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
Apparatus and methods to reduce unwanted motion in precision instruments are described. An active vibration-isolation system may include a feedback loop that senses motion of an intermediate mass. In noisy environments, where the feedback loop would otherwise fail or provide inadequate isolation, feedforward control can be implemented to sense floor vibrations and reduce motion of the intermediate mass that would otherwise be induced by the floor vibrations. The feedforward control can reduce motion of the intermediate mass to a level that allows the feedback loop to operate satisfactorily.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.