Patent · US Active

Precision vibration-isolation system with floor feedforward assistance

US11512757B2 · kind B2 · utility

3Cited by
26References
23Claims
0Family size

Assignee

Inventors

Key dates

Filing dateAug 15, 2018
Grant dateNov 29, 2022
Priority date
Expiry dateOct 3, 2039

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG05B2219/25257
  • WIPO fieldMechanical elements
  • WIPO sectorMechanical engineering

Abstract

Apparatus and methods to reduce unwanted motion in precision instruments are described. An active vibration-isolation system may include a feedback loop that senses motion of an intermediate mass. In noisy environments, where the feedback loop would otherwise fail or provide inadequate isolation, feedforward control can be implemented to sense floor vibrations and reduce motion of the intermediate mass that would otherwise be induced by the floor vibrations. The feedforward control can reduce motion of the intermediate mass to a level that allows the feedback loop to operate satisfactorily.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.