Microelectromechanical (MEMS) scanners for scanning laser devices
US11513341B2 · kind B2 · utility
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17Claims
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Assignee
Inventor
Key dates
| Filing date | Jul 15, 2019 |
| Grant date | Nov 29, 2022 |
| Priority date | — |
| Expiry date | Sep 13, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N30/8554
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The embodiments described herein include scanners that can provide improved scanning laser devices. Specifically, the embodiments described herein provide scanners with a modular construction that includes one or more separately formed piezoelectric actuators coupled to a microelectromechanical system (MEMS) scan plate, flexure structures, and scanner frame. Such modular scanners can provide improved scanning laser devices, including scanning laser projectors and laser depth scanners, LIDAR systems, 3D motion sensing devices, gesture recognition devices, etc.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.