High-resolution magnetic field fingerprinting of integrated circuit activity with a quantum diamond microscope

US11519989B2 · kind B2 · utility

Assignees

• The MITRE Corporation · US
• President and Fellows of Harvard College · US

Inventors

• Matthew Turner · Troy, US
• Edlyn Victoria Levine · Bedford, US
• Pauli Mark Kehayias · Albuquerque, US
• Daniel T. Walters · Bedford, US
• Ronald L. Walsworth · Cambridge, US
• Marko Loncar · Somerville, US
• Nicholas Ryan Langellier · Cambridge, US

Key dates

• Filing date: Jan 31, 2021
• Grant date: Dec 6, 2022
• Expiry date: Jan 31, 2041

Classification

• Technology area (CPC G): Physics
• CPC primary: G01R33/389
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

Devices for determining a state of a magnetic field-generating article are provided. In various embodiments, a device comprises: a single crystal diamond having a plurality of NV centers, the single crystal diamond configured to be disposed adjacent to a magnetic field-generating article, and configured to generate a fluorescent signal in response to being illuminated by a light source; a coherent light source configured to generate a light beam directed at the single crystal diamond; a microwave (MW) radiation source configured to irradiate the single crystal diamond with a MW signal; a magnetic field source configured to apply a bias magnetic field to the single crystal diamond; a photosensor configured to collect the fluorescent signal generated by the single crystal diamond; and a computing node operatively coupled to each of the coherent light source, the MW radiation source, the magnetic field source, and the photosensor.