Catadioptric lens and optical system comprising such a lens

US11520130B2 · kind B2 · utility

Assignee

• Carl Zeiss SMT GmbH · DE

Inventors

• Konstantin Forcht · Aalen, DE
• Dirk Doering · Erfurt, DE

Key dates

• Filing date: Aug 19, 2019
• Grant date: Dec 6, 2022
• Expiry date: Jan 21, 2041

Classification

• Technology area (CPC —): General

Abstract

A catadioptric lens includes at least two optical elements arranged along an optical axis. Both optical elements are configured as a mirror having a substrate and a highly reflective coating applied to an interface of the substrate. The highly reflective coating extends from the interface of the substrate along a surface normal. At least one of the highly reflective coatings has one or a plurality of layers. The optical total layer thickness of the one layer of the plurality of layers increases radially from the inner area outward.