UV/VIS/IR backside-illuminated photon-counting sensor
US11522098B2 · kind B2 · utility
0Cited by
14References
21Claims
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Key dates
| Filing date | Apr 3, 2017 |
| Grant date | Dec 6, 2022 |
| Priority date | — |
| Expiry date | Apr 3, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10F77/1433
Abstract
Some embodiments of the present disclosure provide a semiconductor-based photon-counting sensor comprising a metal-insulator-semiconductor internal photoemission (e.g., thermionic-emission) detector formed on and/or in a first surface of a semiconductor substrate, and at least one jot formed on and/or in a second side of a semiconductor substrate. The at least one MIS photoemission detector and the at least one jot are configured such that a photocarrier generated in response to a photon incident on the MIS thermionic-emission detector is readout by the at least one jot.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.