Patent · US Active

Piston mode Lamb wave resonators

US11522514B2 · kind B2 · utility

4Cited by
4References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateDec 10, 2020
Grant dateDec 6, 2022
Priority date
Expiry dateDec 10, 2040

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH03H9/562
  • WIPO fieldBasic communication processes
  • WIPO sectorElectrical engineering

Abstract

Piston mode Lamb wave resonators are disclosed. A piston mode Lamb wave resonator can include a piezoelectric layer, such as an aluminum nitride layer, and an interdigital transducer on the piezoelectric layer. The piston mode Lamb wave resonator has an active region and a border region, in which the border region has a velocity with a lower magnitude than a velocity of the active region. The border region can suppress a transverse mode.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.