Angular rate sensor with centrally positioned coupling structures
US11525680B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 17, 2021 |
| Grant date | Dec 13, 2022 |
| Priority date | — |
| Expiry date | May 21, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/574
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An angular rate sensor includes first, second, third, and fourth proof masses spaced apart from a surface of a substrate, each of the first, second, third, and fourth proof masses being configured to move along first and second transverse axes parallel to the surface of the substrate. A first coupling structure is interposed between and interconnects the first and second proof masses. A second coupling structure is interposed between and interconnects the second and third proof masses. A third coupling structure is interposed between and interconnects the third and fourth proof masses. A fourth coupling structure is interposed between and interconnects the fourth and first proof masses. The first, second, third, and fourth coupling structures are configured to constrain an in-phase motion of adjacent ones of the first, second, third, and fourth proof masses along the first and second transverse axes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.