Mass flow controller with absolute and differential pressure transducer
US11526181B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 25, 2021 |
| Grant date | Dec 13, 2022 |
| Priority date | — |
| Expiry date | Jun 25, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01F15/005
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Included are mass flow controllers and methods of use. An example mass flow controller comprises a flow pathway through the mass flow controller; the flow pathway comprising a first cavity and a second cavity. The mass flow controller further comprises a laminar flow element. The mass flow controller additionally comprises a combination absolute and differential pressure transducer assembly comprising: a third cavity in fluid communication with the first cavity, an absolute pressure transducer exposed to absolute pressure in the third cavity, and a differential pressure transducer exposed to differential pressure between the third cavity and the second cavity. The mass flow controller also comprises a flow control valve assembly downstream of the laminar flow element and the combination absolute and differential pressure transducer assembly.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.