Micro-electromechanical system devices and methods
US11527376B2 · kind B2 · utility
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7References
20Claims
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Key dates
| Filing date | Jul 25, 2019 |
| Grant date | Dec 13, 2022 |
| Priority date | — |
| Expiry date | Jun 21, 2041 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2203/0315
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A micro-electromechanical system (MEMS) device includes a substrate and a beam suspended relative to a surface of the substrate. The substrate includes a buried insulator layer and a cavity. The beam includes a first portion and a second portion that are separated by an isolation joint. The cavity separates the surface of the substrate from the beam.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.