Piezoelectric film, piezoelectric module, and method of manufacturing piezoelectric film
US11529649B2 · kind B2 · utility
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13Claims
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Key dates
| Filing date | Dec 17, 2018 |
| Grant date | Dec 20, 2022 |
| Priority date | — |
| Expiry date | Mar 30, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N39/00
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A piezoelectric film includes a substrate having flexibility, and at least two piezoelectric elements provided to the substrate so as to be arranged at intervals of a first dimension along a first direction, the piezoelectric elements are each configured by stacking a first electrode film, a piezoelectric film made of an inorganic material, and a second electrode film along a thickness direction of the substrate, and an area between the piezoelectric elements adjacent to each other along the first direction forms a vibrational region which can be displaced in the thickness direction.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.