Sensor system, including a plurality of individual and separate sensor elements

US11531041B2 · kind B2 · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Amin Jemili · Aspenhausiedlung, DE
• Joerg Braeuer · Nehren, DE
• Johannes Classen · Reutlingen, DE

Key dates

• Filing date: Apr 2, 2021
• Grant date: Dec 20, 2022
• Expiry date: Apr 2, 2041

Classification

• Technology area (CPC G): Physics
• CPC primary: G01P15/18
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A sensor system including a plurality of individual and separate sensor elements. Each of the individual sensor elements is independently functional. The individual sensor elements of the sensor system being formed in one piece from parts of a wafer or a vertically integrated wafer stack. The sensor system including at least one separation structure, in particular a scribe line, between the individual and separate sensor elements.