Sensor and electronic device
US11531042B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 2, 2021 |
| Grant date | Dec 20, 2022 |
| Priority date | — |
| Expiry date | Mar 2, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/0817
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
According to one embodiment, a sensor includes a base body, a first supporter fixed to the base body, and a first movable part separated from the base body. The first movable part includes a first movable base part supported by the first supporter, a second movable base part connected with the first movable base part, and a first movable beam. The first movable beam includes a first beam, a first movable conductive part, and a first connection region. The first beam includes a first beam portion, a second beam portion, and a third beam portion between the first beam portion and the second beam portion. The first beam portion is connected with the first movable base part. The second beam portion is connected with the second movable base part. The first connection region connects the third beam portion and the first movable conductive part.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.