Active gas generation apparatus
US11532458B2 · kind B2 · utility
2Cited by
12References
3Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 30, 2018 |
| Grant date | Dec 20, 2022 |
| Priority date | — |
| Expiry date | Sep 4, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/327
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
In the present invention, a high-voltage side electrode component further includes a conductive film disposed on an upper surface of a dielectric electrode independently of a metal electrode. The conductive film is disposed between at least one gas ejection port and the metal electrode in plan view, and the conductive film is set to ground potential.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.