Transfer device, transfer method and vacuum evaporation device
US11535462B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Dec 15, 2017 |
| Grant date | Dec 27, 2022 |
| Priority date | — |
| Expiry date | Apr 7, 2041 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/24
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A transfer device including at least one first transfer component and at least one second transfer component are provided. The first transfer component includes a first carrier pad contacting the transferred object, and the second transfer component includes a second carrier pad contacting the transferred object, and material of the first carder pad has stronger capability to capture electrons than that of the second carrier pad and material of the second carrier pad has stronger capability to lose electrons than that of the first carder pad.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.