Tensioning device, base, clamp and method for clamping mask plate
US11535925B2 · kind B2 · utility
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1References
14Claims
0Family size
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Key dates
| Filing date | Apr 19, 2018 |
| Grant date | Dec 27, 2022 |
| Priority date | — |
| Expiry date | Jun 3, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10K71/231
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A tensioning device, including a base configured to carry a mask plate, a clamp configured to clamp the mask plate, and a deformation adjusting assembly provided on the base or on the clamp, wherein the deformation adjusting assembly is configured to adjust a deformation of an end portion of the mask plate protruding from the base in a direction of gravity when the base carries the mask plate, so as to make the deformation less than a preset deformation threshold. A base, a clamp and a clamping for the mask plate are also provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.