Wafer carrier and method
US11535952B2 · kind B2 · utility
0Cited by
11References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 24, 2020 |
| Grant date | Dec 27, 2022 |
| Priority date | — |
| Expiry date | Sep 24, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2223/54493
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A wafer carrier includes a pocket sized and shaped to accommodate a wafer, the pocket having a base and a substantially circular perimeter, and a removable orientation marker, the removable orientation marker comprising an outer surface and an inner surface, the outer surface having an arcuate form sized and shaped to mate with the substantially circular perimeter of the pocket, and the inner surface comprising a flat face, wherein the removable orientation marker further comprises a notch at a first end of the flat face.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.