Chemically-sensitive field effect transistors, systems, and methods for manufacturing and using the same
US11536722B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 24, 2021 |
| Grant date | Dec 27, 2022 |
| Priority date | — |
| Expiry date | Jun 10, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N27/4146
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus includes a biosensor integrated circuit (IC) chip with sensing zones and/or well structures configured to receive a liquid with biological analytes. The chip includes a passivation layer with an opening over a channel layer and an array of graphene field effect transistors (gFETs) individually having a 2D graphene channel disposed on a dielectric oxide layer, a conductive drain, and a conductive source. A liquid gate is formed above the top surface of the graphene channel. The chip further includes reference electrodes formed in a metal layer, configured to contact the liquid, and disposed at a horizontal distance apart from the graphene channels. The individual gFETs are operable to enable a set of measurements to sense parameters of the biological analytes based on changes in a shape of Id-Vgs transconductance curves. A system and a method have similar structures and perform the functions of the apparatus.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.