High density galvo housing for use with multiple laser beams
US11536956B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 17, 2014 |
| Grant date | Dec 27, 2022 |
| Priority date | — |
| Expiry date | Jan 17, 2039 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB23K26/067
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A multi-beam laser processing system comprising a plurality of laser beams and a plurality of pairs of selectively rotatable mirrors for laser beam steering where each laser beam is independently steered by one pair of selectively rotatable mirrors. The plurality of pairs of mirrors are positioned adjacent to one another within a single main body. The main body is positioned directly opposing the beams, the mirrors directing each laser beam simultaneously to a selected location on a substrate. The main body comprises a plurality of vents; a plurality of passages; a plurality of openings; and a plurality of galvos nested densely within the main body. The galvos direct multiple laser beams to a substrate wherein the fields of view overlap and the laser beam focal point remains small and precise.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.