Patent · US Active

Automated accuracy-oriented model optimization system for critical dimension metrology

US11537837B2 · kind B2 · utility

0Cited by

6References

19Claims

0Family size

Assignee

KLA-TENCOR CORPORATION · US

Inventors

Yuerui Chen · Hangzhou City, CN
Xin Li · Beijing, CN

Key dates

Filing date	Jan 30, 2018
Grant date	Dec 27, 2022
Priority date	—
Expiry date	Oct 30, 2041

Classification

Technology area (CPC G)Physics
CPC primaryG06N20/10
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

Techniques and systems for critical dimension metrology are disclosed. Critical parameters can be constrained with at least one floating parameter and one or more weight coefficients. A neural network is trained to use a model that includes a Jacobian matrix. During training, at least one of the weight coefficients is adjusted, a regression is performed on reference spectra, and a root-mean-square error between the critical parameters and the reference spectra is determined. The training may be repeated until the root-mean-square error is less than a convergence threshold.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.