Transfer printing method and transfer printing apparatus

US11538786B2 · kind B2 · utility

Assignees

• Ordos Yuansheng Optoelectronics Co., Ltd. · CN
• BEIJING BOE TECHNOLOGY DEVELOPMENT CO., LTD. · CN

Inventors

• Xinglong Luan · Beijing, CN
• Jing Feng · Beijing, CN
• Fuqiang Li · Hangzhou City, CN
• Zhichong Wang · Beijing, CN
• Peng Liu · San Diego, US
• Wusheng Li · Shangqiu City, CN
• Chunjing Liu · Beijing, CN

Key dates

• Filing date: Mar 19, 2019
• Grant date: Dec 27, 2022
• Expiry date: Jul 27, 2039

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10H20/036
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

A transfer printing method and a transfer printing apparatus. The transfer method includes: transferring a plurality of devices formed on an original substrate to a transfer substrate; obtaining first position information of positions of the plurality of devices on the transfer substrate; obtaining second position information of corresponding positions, on a target substrate, of devices to be transferred; comparing the first position information with the second position information to obtain first target position information recording a first transfer position; and aligning the transfer substrate with the target substrate and performing a site-designated laser irradiation on at least part of devices on the transfer substrate corresponding to the first transfer position, simultaneously, according to the first target position information, so as to transfer the at least part of the devices from the transfer substrate to the target substrate.