Semiconductor device

US11538908B2 · kind B2 · utility

Assignee

• Nexperia B.V. · NL

Inventors

• Johannes Josephus Theodorus Marinus Donkers · Valkenswaard, NL
• Hans Broekman · Nijmegen, NL

Key dates

• Filing date: Mar 25, 2015
• Grant date: Dec 27, 2022
• Expiry date: Mar 25, 2035

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10D64/62

Abstract

A semiconductor device (100, 100′, 100″) and a method for manufacturing a semiconductor device (100, 100′, 100″). The semiconductor device (100, 100′, 100″) includes a substrate (104, 106), a GaN layer (112), and an AlGaN layer (114). The GaN layer (112) is located between the substrate (104, 106) and the AlGaN layer (114). The device further includes at least one contact (130, 132, 134), comprising a central portion (150) and an edge portion (152), and a passivation layer (160) located at least between the edge portion (152) of the contact (130, 132, 134) and the AlGaN layer (114). The edge portion (152) is spaced apart from an upper surface of the passivation layer (160). The edge portion (152) may be spaced apart from the passivation layer (160) by a further layer (170) or by an air gap (172).