Evaporating mask plate, evaporating mask plate set, evaporating system, and alignment test method
US11538993B2 · kind B2 · utility
1Cited by
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19Claims
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Key dates
| Filing date | Jan 5, 2018 |
| Grant date | Dec 27, 2022 |
| Priority date | — |
| Expiry date | Feb 5, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10K71/70
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
An evaporating mask plate, an evaporating mask plate set and an evaporating system are provided. The evaporating mask plate includes a mask pattern plate. The evaporating mask pattern plate includes an evaporating area and a test area located around the evaporating area. The test area is provided with at least two test element groups located in different regions of the test area, and each test element group includes at least one test hole for alignment.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.