Non-contact transport device
US11541554B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 8, 2021 |
| Grant date | Jan 3, 2023 |
| Priority date | — |
| Expiry date | Feb 8, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/6838
- WIPO fieldHandling
- WIPO sectorMechanical engineering
Abstract
A non-contact transport device includes a deflector having a flange portion provided with a plurality of nozzle grooves extending radially outward and arranged equidistantly in the circumferential direction. The nozzle grooves are each formed to be hollowed with respect to an upper surface of the flange portion so as to have an arc-shaped cross section, and constitute lead-out channels together with a flat surface of a hollow of a body. A pressure fluid is supplied through a first port of the body into the body and flows through the plurality of nozzle grooves to a workpiece holding surface along first and second curved surfaces of the hollow. As a result, the pressure fluid flowing at high speed between the workpiece holding surface and a workpiece generates a suction force exerted toward the body side, whereby the workpiece is suctioned.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.