Optical monitor
US11542596B2 · kind B2 · utility
0Cited by
2References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 1, 2019 |
| Grant date | Jan 3, 2023 |
| Priority date | — |
| Expiry date | Feb 20, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/8416
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A coating system may include a coating chamber; a substrate holder to move a substrate along a motion path; and a sensor device in the coating chamber, wherein the sensor device is configured to move along the motion path, and wherein the sensor device is to perform a spectral measurement on the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.