Vacuum valve with position sensor
US11543051B2 · kind B2 · utility
1Cited by
15References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 28, 2018 |
| Grant date | Jan 3, 2023 |
| Priority date | — |
| Expiry date | Jun 28, 2038 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF16K51/02
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
Disclosed is a vacuum valve having a valve closure and having a drive unit which is coupled to the valve closure and which has at least one adjustment element. The vacuum valve furthermore has a position sensor, in particular a travel or distance sensor, such that a position of the valve closure and/or of the at least one adjustment element relative to a zero position, in particular an open position or closed position of the vacuum valve, can be measured.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.