Inorganic matrix nanoimprint lithographs and methods of making thereof with reduced carbon

US11543584B2 · kind B2 · utility

Assignee

• Meta Platforms Technologies, LLC · US

Inventors

• Giuseppe Calafiore · Redmond, US
• Tingling Rao · Bellevue, US
• Ankit Vora · San Jose, US
• Peter Topalian · Seattle, US

Key dates

• Filing date: Jun 30, 2021
• Grant date: Jan 3, 2023
• Expiry date: Jul 3, 2041

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B2027/0174
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

The disclosure provides high refractive index ceramic material nanoimprint lithography (NIL) gratings having a relatively lower amount of carbon compared to traditional NIL gratings, and methods of making and using thereof, and devices including such gratings. The ceramic material includes one or more of titanium oxide, zirconium oxide, hafnium oxide, tungsten oxide, zinc tellurium, gallium phosphide, or any combination or derivative thereof.